Substrate for semiconductor package and process for manufacturing

ABSTRACT

A semiconductor package substrate includes a core portion, an upper circuit layer and a plurality of pillars. The pillars are disposed on and project upward from the upper circuit layer. Top surfaces of the pillars are substantially coplanar. The pillars provide an electrical interconnect to a semiconductor die. Solder joint reliability as between the substrate and the semiconductor die is improved.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority to provisional application Ser. No.61/668,389, filed on Jul. 5, 2012, the entire contents of which arehereby incorporated by reference.

BACKGROUND

1. Field of the Invention

The present embodiments relate to a package substrate and process formaking the same, and more particularly to a package substrate withpillars and a process for making the same.

2. Description of the Related Art

Package substrates provided with a plurality of pillars for connectingthe solder bumps of a semiconductor die have been proposed. After areflow process, solder joints are formed between the die and thepillars, so that the die is bonded to the pillars and the electricalconnection therebetween is secured. The pillars are typically formed byelectroplating. However, non-predictable and variable plating parametersin the plating bath often leads to over-plating or under-plating, which,in turn, results in the top surfaces of the plated pillars not beingcoplanar. The coplanarity issue negatively affects the solder jointreliability after packaging. Fine-pitch solder bumps, wafer levelpackaging (WLP), and large-scale substrates are particularly sensitiveto this issue. The coplanarity issue mainly results from the non-uniformelectric current density distribution, which is especially serious onmicro-scale patterns. This non-uniform electric current densitydistribution is not caused by only one factor, but by various platingparameters such as plating bath design, chemical additives, magnitude ofcurrent density, use of current type, distance between cathode andanode, agitation method, chemical maintenance, pre-cleaning solution,configurations, arrangements and volumes of patterns, high aspect ratio,and so on. Current manufacturing processes make it difficult to controlthe height deviation of the pillars to within a range of 5 μm.

SUMMARY

One of the present embodiments is directed to a package substrate,comprising a dielectric layer, a circuit layer disposed on or in thedielectric layer, and a plurality of pillars disposed on the circuitlayer. Each of the pillars has a top surface adapted for making externalelectrical connection, and the top surfaces of the pillars aresubstantially coplanar with each other.

Another of the present embodiments is directed to a semiconductorpackage, comprising a dielectric layer having an upper surface, acircuit layer disposed on or in the dielectric layer, and a plurality ofpillars disposed on the circuit layer. Heights of the pillars aresubstantially equal, wherein the heights are defined as the distancebetween a top end of each of the pillars and the upper surface of thedielectric layer.

Another of the present embodiments is directed to a process for making apackage substrate, comprising providing a dielectric layer with acircuit layer disposed thereon or therein, forming a photoresist patternadjacent to the circuit layer, wherein the photoresist pattern has aplurality of openings, forming a plurality of pillars in the openings ofthe photoresist pattern, wherein the pillars are electrically connectedto the circuit layer, planarizing the pillars so that each of thepillars has a top surface, and the top surfaces of the pillars aresubstantially coplanar with each other, and removing the photoresistpattern.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a package substrate according to one of the presentembodiments;

FIGS. 2-9 illustrate a process for making a package substrate accordingto one of the present embodiments;

FIG. 10 illustrates a semiconductor package according to one of thepresent embodiments;

FIG. 11 illustrates a semiconductor package according to another of thepresent embodiments;

FIGS. 12-13 illustrate a process for making a package substrateaccording to another of the present embodiments;

FIG. 14 illustrates a semiconductor package according to another of thepresent embodiments;

FIG. 15 illustrates a process for making a package substrate accordingto another of the present embodiments;

FIG. 16 illustrates a semiconductor package according to another of thepresent embodiments:

FIG. 17 illustrates a package substrate according to another of thepresent embodiments:

FIG. 18 illustrates a process for making a package substrate accordingto another of the present embodiments;

FIG. 19 illustrates a package substrate according to another of thepresent embodiments;

FIG. 20 illustrates a package substrate according to another of thepresent embodiments;

FIG. 21 illustrates a process for making a package substrate accordingto another of the present embodiments;

FIG. 22 illustrates a package substrate according to another of thepresent embodiments;

FIG. 23 illustrates a semiconductor package according to another of thepresent embodiments;

FIGS. 24-25 illustrate a process for making a package substrateaccording to another of the present embodiments;

FIG. 26 illustrates a semiconductor package according to another of thepresent embodiments;

FIG. 27 illustrates a semiconductor package according to another of thepresent embodiments;

FIG. 28 illustrates a process for making a package substrate accordingto another of the present embodiments;

FIG. 29 illustrates a semiconductor package according to another of thepresent embodiments;

FIG. 30 illustrates a package substrate according to another of thepresent embodiments;

FIG. 31 illustrates a process for making a package substrate accordingto another of the present embodiments;

FIG. 32 illustrates a package substrate according to another of thepresent embodiments; and

FIGS. 33 to 38 illustrate a process for making a package substrateaccording to another of the present embodiments.

Common reference numerals are used throughout the drawings and thedetailed description to indicate the same elements. The presentinvention will be more apparent from the following detailed descriptiontaken in conjunction with the accompanying drawings.

DETAILED DESCRIPTION

Referring to FIG. 1, a package substrate according to one of the presentembodiments is illustrated. The package substrate 1 comprises a coreportion 10, a plurality of conductive vias 11, an upper inner circuitlayer 12, a lower inner circuit layer 14, an upper dielectric layer 16,an upper conductive foil 17, a lower dielectric layer 18, a lowerconductive foil 19, an upper outermost circuit layer 20, a loweroutermost circuit layer 26, a plurality of upper interconnection metals32, a plurality of lower interconnection metals 34, a plurality ofpillars 36, an upper protection layer 38, and a lower protection layer40. Although the substrate 1 is illustrated as including four circuitlayers, in other embodiments, the substrate I may include only one, two,three, or five or more circuit layers.

The core portion 10 has an upper surface 101, a lower surface 102 and aplurality of through holes 103. The core portion 10 may be made of afiber-reinforced resin material and/or prepreg (PP) for increasedrigidity, for example. The fibers may be glass fibers, or KEVLAR® fibers(aramid fibers), for example. Examples of resin materials that may bereinforced by fibers for use in the laminated dielectric materialinclude Ajinomoto build-up film (ABF), bismaleimide triazine (BT),prepreg, polyimide (PI), liquid crystal polymer (LCP), epoxy, and otherresin materials.

The conductive vias 11 are disposed in the through holes 103 of the coreportion 10, and penetrate through the core portion 10. Two ends of eachof the conductive vias 11 physically contact and electrically connectthe upper inner circuit layer 12 and the lower inner circuit layer 14respectively. In some embodiments, the conductive via 11 has aconductive metal 111 and a central insulation material 112. Theconductive metal 111 is disposed on the sidewall of the through hole 103and defines a central passage, and the central insulation material 112is disposed in the central passage. In other embodiments, the conductivemetal 111 may fill the through hole 103, and the central insulationmaterial 112 may be omitted. In some embodiments, the material of theconductive metal 111 may be copper.

The upper inner circuit layer 12 and the lower inner circuit layer 14are disposed adjacent to the core portion 10. In some embodiments, theupper inner circuit layer 12 and the lower inner circuit layer 14 aredisposed on the upper surface 101 and the lower surface 102 of the coreportion 10 respectively. The conductive metal 111, the upper innercircuit layer 12 and the lower inner circuit layer 14 may be formed atthe same time. Therefore, the material of the upper inner circuit layer12 and the lower inner circuit layer 14 may also be copper. The upperinner circuit layer 12 and the lower inner circuit layer 14 may have aplurality of circuit segments with traces or pads, and the circuitsegments are electrically insulated to each other.

The upper dielectric layer 16 is disposed on the upper inner circuitlayer 12, and has a plurality of openings 161 to expose parts of theupper inner circuit layer 12. The upper conductive foil 17 is disposedon the upper dielectric layer 16, and the openings 161 penetrate throughthe upper conductive foil 17. The lower dielectric layer 18 is disposedon the lower inner circuit layer 14, and has a plurality of openings 181to expose parts of the lower inner circuit layer 14. The lowerconductive foil 19 is disposed on the lower dielectric layer 18, and theopenings 181 penetrate through the lower conductive foil 19. Thematerial of the upper dielectric layer 16 and the lower dielectric layer18 may be a non-conductive polymer such as polyimide (PI), epoxy, orbenzocyclobutene (BCB). Alternatively, an inorganic passivation layer,such as silicon dioxide (Si0 ₂), may be used. In some embodiments, theupper dielectric layer 16 and the lower dielectric layer 18 can be aphoto sensitive polymer, such as benzocyclobutene, and can be formed byspin coating or spray coating.

The upper outermost circuit layer 20 is disposed on the upper dielectriclayer 16, and the lower outermost circuit layer 26 is disposed on thelower dielectric layer 18. The upper outermost circuit layer 20 and thelower outermost circuit layer 26 may have a plurality of segments withtraces or pads, with the segments electrically insulated from eachother. In some embodiments, the upper outermost circuit layer 20comprises the upper conductive foil 17, an upper seed layer 22 and anupper metal layer 24. The material of the upper seed layer 22 may betantalum nitride or tantalum tungsten, for example, and the material ofthe upper metal layer 24 may be copper, for example. However, the upperseed layer 22 and the upper conductive foil 17 may be omitted, such thatthe upper metal layer 24 comprises the upper outermost circuit layer 20.Similarly, the lower outermost circuit layer 26 comprises the lowerconductive foil 19, a lower seed layer 28 and a lower metal layer 30.The material of the lower seed layer 28 may be tantalum nitride ortantalum tungsten, for example, and the material of the lower metallayer 30 may be copper, for example. However, the lower seed layer 28and the lower conductive foil 19 may be omitted, such that the lowermetal layer 30 comprises the lower outermost circuit layer 26.

The upper interconnection metals 32 are disposed in the openings 161 ofthe upper dielectric layer 16, and physically contact and electricallyconnect the upper inner circuit layer 12 and the upper outermost circuitlayer 20. In some embodiments, the upper interconnection metal 32comprises the upper seed layer 22 and the upper metal layer 24. However,the upper seed layer 22 may be omitted, such that the upper metal layer24 comprises the upper interconnection metal 32. Similarly, the lowerinterconnection metals 34 are disposed in the openings 181 of the lowerdielectric layer 18, and physically contact and electrically connect thelower inner circuit layer 14 and the lower outermost circuit layer 26.In some embodiments, the lower interconnection metal 34 comprises thelower seed layer 28 and the lower metal layer 30. However, the lowerseed layer 28 may be omitted, such that the lower metal layer 30comprises the lower interconnection metal 34.

The pillars 36 are disposed on the upper outermost circuit layer 20 andare electrically connected to the upper inner circuit layer 12. Eachpillar 36 may have a substantially circular column shape or asubstantially circular cylinder shape. Each of the pillars 36 has a topsurface 361 for making external electrical connection (for example, toanother electrical connection in a semiconductor chip), and the topsurfaces 361 of the pillars 36 are flat and substantially coplanar. Insome embodiments, the top surfaces 361 of the pillars 36 may be madecoplanar by machining, which creates high yields and reliability. Thecoplanarity of the top surfaces 361 of the pillars 36 may be ±3 μm. Inother words, the deviation in height H of the pillars 36 from thedesired and expected dimension is within the range of 3 μm, wherein theheight H is defined as the distance between the top surface 361 of eachof the pillars 36 and the upper surface 162 of the upper dielectriclayer 16. Thus, the difference between the greatest value of the heightsH and the least value of the heights H is 6 μm or less. Alternatively,the difference between the greatest value of the heights H and the leastvalue of the heights H may be less than 10% of the desired and expecteddimension. In some embodiments, the material of the pillars 36 may becopper, and the desired and expected height H is about 60 μm.

The upper protection layer 38 is disposed on the upper outermost circuitlayer 20, and has at least one opening 381 to expose a part of the upperoutermost circuit layer 20. The pillars 36 are all disposed within acommon opening 381. That is, the upper protection layer 38 is notdisposed in the spaces between the pillars 36. The lower protectionlayer 40 is disposed on the lower outermost circuit layer 26, and has aplurality of openings 401. Each opening 401 exposes a part of the loweroutermost circuit layer 26, wherein the exposed part acts as a ballland, e.g., a ball grid array terminal, upon which a Ball Grid Array(BGA) solder ball may be formed as discussed below. In some embodiments,the upper protection layer 38 and the lower protection layer 40 may besolder masks made of, e.g., polyimide.

In the illustrated embodiment, the top surfaces 361 of the pillars 36 ofthe package substrate 1 are flat and coplanar. Improved coplanarity ofthe top surfaces 361 of the pillars 36 may enable better solder jointreliability after packaging, especially when the pitch between thepillars 36 is very small.

Referring to FIGS. 2-9, a process for making a package substrateaccording to one of the present embodiments is illustrated. Referring toFIG. 1 an inner-layer structure 100 is provided. The inner-layerstructure 100 has the core portion 10, the conductive vias 11, the upperinner circuit layer 12, and the lower inner circuit layer 14. The coreportion 10 has an upper surface 101, a lower surface 102 and a pluralityof through holes 103. The core portion 10 may be a preformed prepregcomprising resin and glass fiber, or any other material. The inner-layerstructure 100 may be formed by selectively patterning a copper cladlaminate (CCL) made of BT or FR-4/FR-5 epoxies.

Then, the upper dielectric layer 16 and the lower dielectric layer 18are formed on the upper inner circuit layer 12 and the lower innercircuit layer 14, respectively. The upper dielectric layer 16 has anupper surface 162. The material of the upper dielectric layer 16 and thelower dielectric layer 18 may be non-conductive polymer such aspolyimide (PI), epoxy or benzocyclobutene (BCB). Alternatively, aninorganic passivation layer, such as silicon dioxide (SiO₂), may beused. In some embodiments, the upper dielectric layer 16 and the lowerdielectric layer 18 can be a photo sensitive polymer such asbenzocyclobutene, and can be formed by spin coating or spray coating.

Then, the upper conductive foil 17 is disposed on the upper dielectriclayer 16, and the lower conductive foil 19 is disposed on the lowerdielectric layer 18. Either or both of the upper conductive foil 17 andthe lower conductive foil 19 may be formed by pressing, or any otherprocess. In some embodiments, the upper conductive foil 17 and the upperdielectric layer 16 may be simultaneously formed by laminating a resincoated copper foil (RCC) on the inner-layer structure 100. Similarly,the lower conductive foil 19 and the lower dielectric layer 18 may besimultaneously formed by laminating another resin coated copper foil(RCC) on the inner-layer structure 100.

Then, a plurality of openings 161 are formed to penetrate through theupper conductive foil 17 and the upper dielectric layer 16 to exposeparts of the upper inner circuit layer 12. In some embodiments, theopenings 161 may be formed by laser drilling. A plurality of openings181 are formed to penetrate through the lower conductive foil 19 and thelower dielectric layer 18 to expose parts of the lower inner circuitlayer 14. As discussed above, the upper conductive foil 17 and the lowerconductive foil 19 may be omitted.

Referring to FIG. 3, the upper seed layer 22 is formed on the upperconductive foil 17, or the upper dielectric layer 16 (if the upperconductive foil 17 is omitted), and in the openings 161 of the upperdielectric layer 16 to contact the upper inner circuit layer 12. Thelower seed layer 28 is formed on the lower conductive foil 19, or thelower dielectric layer 18 (if the lower conductive foil 19 is omitted),and in the openings 181 of the lower dielectric layer 18 to contact thelower inner circuit layer 14. Either or both of the upper seed layer 22and the lower seed layer 28 may be formed by electroless plating, or anyother process. The material of the upper seed layer 22 and the lowerseed layer 28 may be tantalum nitride or tantalum tungsten.

Then, an upper dry film 42 is formed on the upper seed layer 22. Theupper dry film 42 has a plurality of openings 421 to expose the upperseed layer 22, and some of the openings 421 correspond to the openings161 of the upper dielectric layer 16. A lower dry film 44 is formed onthe lower seed layer 28. The lower dry film 44 has a plurality ofopenings 441 to expose the lower seed layer 28, and some of the openings441 correspond to the openings 181 of the lower dielectric layer 18.

Referring to FIG. 4, a metal, such as copper, is applied in the openings421 of the upper dry film 42 to form the upper metal layer 24. The metalis formed in the openings 441 of the lower dry film 44 to form the lowermetal layer 30. Either or both of the upper metal layer 24 and the lowermetal layer 30 may be formed by plating, for example, or by any otherprocess.

Referring to FIG. 5, the upper dry film 42 and the lower dry film 44 areremoved. At this step, the upper outermost circuit layer 20 is formed onthe upper dielectric layer 16, and the lower outermost circuit layer 26is formed on the lower dielectric layer 18. In some embodiments, theupper outermost circuit layer 20 comprises an upper seed layer 22 and anupper metal layer 24, and the lower outermost circuit layer 26 comprisesa lower seed layer 28 and a lower metal layer 30. The upperinterconnection metals 32 are formed in the openings 161 of the upperdielectric layer 16, and physically contact and electrically connect theupper inner circuit layer 12 and the upper outermost circuit layer 20.In some embodiments, the upper interconnection metal 32 comprises theupper seed layer 22 and the upper metal layer 24, and the lowerinterconnection metals 34 are disposed in the openings 181 of the lowerdielectric layer 18, and physically contact and electrically connect thelower inner circuit layer 14 and the lower outermost circuit layer 26.At this step of this embodiment, the upper seed layer 22 and the lowerseed layer 28 are not patterned.

Referring to FIG. 6, an upper photoresist pattern 46 and a lowerphotoresist layer 48 are formed on the upper outermost circuit layer 20and the lower outermost circuit layer 26, respectively. The upperphotoresist pattern 46 has a plurality of openings 461 to expose a partof the upper outermost circuit layer 20.

Referring to FIG. 7, a metal, such as copper, is applied in the openings461 of the upper photoresist pattern 46 to form the pillars 36. Thepillars 36 may be formed by plating, for example, or by any otherprocess. Therefore, the pillars 36 are disposed on the upper innercircuit layer 12, and are electrically connected to the upper innercircuit layer 12 by the upper outermost circuit layer 20 and the upperinterconnection metal 32.

Referring to FIG. 8, the pillars 36 and the upper photoresist pattern 46are planarized, so that each of the pillars 36 has a top surface 361,and the top surfaces 361 of the pillars 36 are substantially coplanarwith the upper surface 462 of the upper photoresist pattern 46. Theplanarizing step may be accomplished by grinding, polishing, lapping,plasma processing, etching, or any other process. In some embodiments,the planarizing step may be accomplished by grinding using a ceramicroller 50 or a diamond roller. Whatever process is used, it preferablyremoves any bulged portions of the pillars 36 that may have formed inthe previous step, and thins the upper photoresist pattern 46, so thatthe top surfaces 361 of the pillars 36 and the upper surface 462 of theupper photoresist pattern 46 are at the same level.

Referring to FIG. 9, the upper photoresist pattern 46 and the lowerphotoresist layer 48 are removed. Then, the upper seed layer 22 and theportions of the upper conductive foil 17 that are not covered by theupper metal layer 24 are removed, so that the upper outermost circuitlayer 20 has a plurality of segments with traces or pads, and thesegments are electrically insulated to each other. Similarly, the lowerseed layer 28 and the portions of the lower conductive foil 19 that arenot covered by the lower metal layer 30 are removed, so that the loweroutermost circuit layer 26 has a plurality of segments with traces orpads, and the segments are electrically insulated to each other. Thesesteps may be performed by etching, for example, or by other reductionprocesses.

Then, the upper protection layer 38 is formed on the upper outermostcircuit layer 20 to surround the pillars 36, and has at least oneopening 381 to expose a part of the upper outermost circuit layer 20.The pillars 36 are disposed within a common opening 381. That is, theupper protection layer 38 is not formed in the spaces between thepillars 36. The lower protection layer 40 is formed on the loweroutermost circuit layer 26, and has a plurality of openings 401 toexpose a part of the lower outermost circuit layer 26. Either or both ofthe upper protection layer 38 and the lower protection layer 40 may beformed by coating, for example, or by any other process(es). In someembodiments, the upper protection layer 38 and the lower protectionlayer 40 may be solder masks, such as polyimide. Thus, the packagesubstrate 1 as shown in FIG. 1 is obtained.

Referring to FIG. 10, a semiconductor package according to one of thepresent embodiments is illustrated. The semiconductor package 2comprises the package substrate 1, an upper die 52, a plurality of uppersolder balls 54, an underfill 56, a molding compound 58, and a pluralityof lower solder balls 60. The upper die 52 is attached to the packagesubstrate 1. In some embodiments, the upper die 52 may have the uppersolder balls 54 on a surface thereof, and each of the upper solder balls54 is bonded to each of the pillars 36. The solder 54 extends to thesidewalls of the pillar 36. The underfill 56 is disposed between theupper die 52 and the package substrate 1 to protect the upper solderballs 54 and the pillars 36. The molding compound 58 is disposed on theupper protection layer 38 to encapsulate the upper die 52 and theunderfill 56. The lower solder balls 60 are disposed on the exposedparts of the lower outermost circuit layer 26 in the openings 401 of thelower protection layer 40 for external connection.

Referring to FIG. 11, a semiconductor package according to another ofthe present embodiments is illustrated. The semiconductor package 2 a ofthis embodiment is substantially similar to the semiconductor package 2of FIG. 10, and the same elements are designated with same referencenumerals. In the embodiment of FIG. 11, the package substrate 1 afurther comprises a plurality of surface finish layers 37 (for example,Ni/Au) disposed on the top surfaces 361 of the pillars 36. The surfacefinish layers 37 may not extend to the sidewalls of the pillars 36.

Referring to FIGS. 12-13, a process for making a package substrateaccording to another of the present embodiments is illustrated. Theinitial steps of the process of this embodiment are the same as thesteps of FIGS. 2-8, and will not be repeated here. Referring to FIG. 12,a surface finish layer 37 (for example, Ni/Au) is formed on each of thetop surfaces 361 of the pillars 36. The surface finish layer 37 may beformed by plating, for example, or by any other process.

Referring to FIG. 13, the upper photoresist pattern 46 and the lowerphotoresist layer 48 are removed. Then, the upper outermost circuitlayer 20 and the lower outermost circuit layer 26 are formed as shown inFIG. 9. In some embodiments, the surface finish layer 37 is disposedonly on the top surface 361 of the pillar 36, and does not extend to thesidewall of the pillar 36. Then, the upper protection layer 38 is formedon the upper outermost circuit layer 20, and the lower protection layer40 is formed on the lower outermost circuit layer 26. Thus, the packagesubstrate 1 a as shown in FIG. 11 is obtained.

Referring to FIG. 14, a semiconductor package according to another ofthe present embodiments is illustrated. The semiconductor package 2 b ofthis embodiment is substantially similar to the semiconductor package 2of FIG. 10, and the same elements are designated with same referencenumerals. In the embodiment of FIG. 14, each of the pillars 36 of thepackage substrate lb further has a concave recess portion 362 in the topend of the pillar 36. The concave recess portions 362 help to immobilizethe solder bumps 54 to prevent misalignment between the bumps 54 and thepillars 36 during a packaging process. Specifically, during oneembodiment of a packaging process, the die 52 is placed on the substrate1 b to form an intermediate assembly structure in a manner that itssolder bumps 54 are aligned with corresponding pillars 36, and thensolder joints are formed by a reflowing process in an oven. Whentransporting the intermediate assembly structure to the oven, theconcave recess portions 362 help to immobilize the solder bumps 54 toprevent misalignment between the bumps 54 and the pillars 36. Theconcave recess portion 362 has a top edge forming a reference surface363. The reference surfaces 363 of the pillars 36 are substantiallycoplanar, and the height H is defined as the distance between thereference surface 363 of each of the pillars 36 and the upper surface162 of the upper dielectric layer 16. That is, the height H of thisembodiment is equal to the height H of FIG. 10. In some embodiments, therecess portion 362 has a curved surface, such as semispherical, and thedistance between the reference surface 363 of each of the pillars 36 andthe bottom of the recess portion 362 is about 15 μm. The solder 54 fillsthe recess portion 362 and further extends to the sidewall of the pillar36.

Referring to FIG. 15, a process for making a package substrate accordingto another of the present embodiments is illustrated. The initial stepsof the process of this embodiment are the same as the steps of FIGS.2-8, and will not be repeated here. Referring to FIG. 15, a topphotoresist layer 62 is formed on the planarized upper surface 462 ofthe upper photoresist pattern 46, wherein the top photoresist layer 62has a plurality of openings 621 to expose the top surfaces 361 of thepillars 36. Then, a part of each of the top ends of the pillars 36 isremoved from the top surfaces 361 at the openings 621, so as to form arecess portion 362 on each of the top surfaces 361 of the pillars 36.The recess portions 362 may be formed by etching, for example, or by anyother process. Therefore, each of the top surfaces 361 of the pillars 36becomes the reference surface 363 which is defined by the top edge ofthe recess portion 362. Then, the top photoresist layer 62 is removed,and the subsequent step of this embodiment is the same as the step ofFIG. 9. Thus, the package substrate 1 b as shown in FIG. 14 is obtained.

Referring to FIG. 16, a semiconductor package according to another ofthe present embodiments is illustrated. The semiconductor package 2 c ofthis embodiment is substantially similar to the semiconductor package 2b of FIG. 14, and the same elements are designated with same referencenumerals. In the embodiment of FIG. 16, the package substrate 1 cfurther comprises a plurality of surface finish layers 37 (for example,Ni/Au) disposed only on the recess portions 362 of the pillars 36. Thatis, the surface finish layers 37 do not extend to the sidewalls of thepillars 36. The solder 54 fills the recess portion 362 but does notfurther extend to the sidewall of the pillar 36. In the manufacturingprocess, the surface finish layer 37 is formed on the recess portion 362of FIG. 15.

Referring to FIG. 17, a package substrate according to another of thepresent embodiments is illustrated. The package substrate 1 d of thisembodiment is substantially similar to the package substrate 1 b of FIG.14, and the same elements are designated with same reference numerals.The difference between the package substrate 1 d of FIG. 17 and thepackage substrate 1 b of FIG. 14 is that the recess portion 362 of thisembodiment has a V-shaped surface in cross-sectional view.

Referring to FIG. 18, a process for making a package substrate accordingto another of the present embodiments is illustrated. The initial stepsof the process of this embodiment are the same as the steps of FIGS.2-8, and will not be repeated here. Referring to FIG. 18, a drill 70having a V-shaped head in cross-sectional view is provided. Then, a partof each of the top ends of the pillars 36 is removed from the topsurfaces 361 by drilling, so as to form a recess portion 362 on each ofthe top surfaces 361 of the pillars 36. Therefore, the recess portion362 has a V-shaped surface corresponding to the shape of the drill 70.Then, the subsequent step of this embodiment is the same as the step ofFIG. 9. Thus, the package substrate 1 d as shown in FIG. 17 is obtained.

Referring to FIG. 19, a package substrate according to another of thepresent embodiments is illustrated. The package substrate le of thisembodiment is substantially similar to the package substrate 1 d of FIG.17, and the same elements are designated with same reference numerals.In the embodiment of FIG. 19, the package substrate 1 e furthercomprises a plurality of surface finish layers 37 (for example, Ni/Au)disposed only on the recess portions 362 of the pillars 36. That is, thesurface finish layers 37 do not extend to the sidewalls of the pillars36.

Referring to FIG. 20, a package substrate according to another of thepresent embodiments is illustrated. The package substrate 1 f of thisembodiment is substantially similar to the package substrate 1 b of FIG.14, and the same elements are designated with same reference numerals.The difference between the package substrate 1 f of FIG. 20 and thepackage substrate 1 b of FIG. 14 is that the recess portion 362 of thisembodiment has a trapezoidal surface in cross-sectional view.

Referring to FIG. 21, a process for making a package substrate accordingto another of the present embodiments is illustrated. The initial stepsof the process of this embodiment are the same as the steps of FIGS.2-8, and will not be repeated here. Referring to FIG. 21, a drill 72having a trapezoidal head in cross-sectional view is provided. Then, apart of each of the top ends of the pillars 36 is removed from the topsurfaces 361 by drilling, so as to form a recess portion 362 on each ofthe top surfaces 361 of the pillars 36. Therefore, the recess portion362 has a trapezoidal surface corresponding to the shape of the drill72. Then, the subsequent step of this embodiment is the same as the stepof FIG. 9. Thus, the package substrate 1 f as shown in FIG. 20 isobtained.

Referring to FIG. 22, a package substrate according to another of thepresent embodiments is illustrated. The package substrate 1 g of thisembodiment is substantially similar to the package substrate 1 f of FIG.20, and the same elements are designated with same reference numerals.In the embodiment of FIG. 22, the package substrate 1 f furthercomprises a plurality of surface finish layers 37 (for example, Ni/Au)disposed only on the recess portions 362 of the pillars 36. That is, thesurface finish layers 37 do not extend to the sidewalls of the pillars36.

Referring to FIG. 23, a semiconductor package according to another ofthe present embodiments is illustrated. The semiconductor package 2 h ofthis embodiment is substantially similar to the semiconductor package 2of FIG. 10, and the same elements are designated with same referencenumerals. In the embodiment of FIG. 23, each of the pillars 36 of thepackage substrate 1 h further has a protrusion portion 66 protrudingfrom the top surface 361 thereof. In some embodiments, the protrusionportion 66 is disposed at the periphery of the top surface 361, and thematerial of the protrusion portion 66 may be the same as or differentfrom that of the pillar 36.

Referring to FIGS. 24-25, a process for making a package substrateaccording to another of the present embodiments is illustrated. Theinitial steps of the process of this embodiment is the same as the stepsof FIGS. 2-8, and will not be repeated here. Referring to FIG. 24, a topphotoresist layer 64 is formed on the planarized upper surface 462 ofthe upper photoresist pattern 46, wherein the top photoresist layer 64has a plurality of openings 641 to expose parts of the top surfaces 361of the pillars 36.

Referring to FIG. 25, a metal is plated on the top surfaces 361 in theopenings 641, so as to form the protrusion portion 66 on each of the topsurfaces 361 of the pillars 36. The material of the protrusion portion66 may be the same as or different from that of the pillar 36. Then, thetop photoresist layer 64 is removed, and the subsequent step of thisembodiment is the same as the step of FIG. 9. Thus, the packagesubstrate 1 h as shown in FIG. 23 is obtained.

Referring to FIG. 26, a semiconductor package according to another ofthe present embodiments is illustrated. The semiconductor package 2 i ofthis embodiment is substantially similar to the semiconductor package 2h of FIG. 23, and the same elements are designated with same referencenumerals. In the embodiment of FIG. 26, the package substrate 1 ifurther comprises a plurality of surface finish layers 37 (for example,Ni/Au) disposed only on the protrusion portion 66 of the pillars 36.That is, the surface finish layers 37 do not extend to the sidewalls ofthe pillars 36. In the manufacturing process, the surface finish layer37 is formed on the protrusion portion 66 of FIG. 23.

Referring to FIG. 27, a semiconductor package according to another ofthe present embodiments is illustrated. The semiconductor package 2 j ofthis embodiment is substantially similar to the semiconductor package 2of FIG. 10, and the same elements are designated with same referencenumerals. In the embodiment of FIG. 27, each of the pillars 36 of thepackage substrate 1 j further has a recess portion 362 recessed from thetop end of the pillar 36 toward the core portion 10. The recess portion362 has a top edge forming a reference surface 363, the referencesurfaces 363 of the pillars 36 are substantially coplanar, and theheight H is defined as the distance between the reference surface 363 ofeach of the pillars 36 and the upper surface 162 of the upper dielectriclayer 16. That is, the height H of this embodiment is equal to theheight H of FIG. 10. In some embodiments, the recess portion 362 isdisposed at the periphery of the top end of the pillar 36, and do notextend to the bottom of the pillar 36. The solder 54 further extends tothe sidewall of the pillar 36.

Referring to FIG. 28, a process for making a package substrate accordingto another of the present embodiments is illustrated. The initial stepsof the process of this embodiment is the same as the steps of FIGS. 2-8,and will not be repeated here. Referring to FIG. 28, a top photoresistlayer 68 is formed on the planarized upper surface 462 of the upperphotoresist pattern 46, wherein the top photoresist layer 68 has aplurality of openings 681 to expose parts of the top surfaces 361 of thepillars 36. Then, a part of each of the top ends of the pillars 36 isremoved from the top surfaces 361 at the openings 681, so as to form therecess portion 362 on each of the top ends of the pillars 36. This stepmay be performed by etching, for example, or any other process.Therefore, each of the top surfaces 361 of the pillars 36 becomes thereference surface 363 defined by the top edge of the recess portion 362.Then, the top photoresist layer 68 is removed, and the subsequent stepof this embodiment is the same as the step of FIG. 9. Thus, the packagesubstrate 1 j as shown in FIG. 27 is obtained.

Referring to FIG. 29, a semiconductor package according to another ofthe present embodiments is illustrated. The semiconductor package 2 k ofthis embodiment is substantially similar to the semiconductor package 2j of FIG. 27, and the same elements are designated with same referencenumerals. In the embodiment of FIG. 29, the package substrate 1 kfurther comprises a plurality of surface finish layers 37 (for example,Ni/Au) disposed only on the recess portion 362 of the pillars 36. Thatis, the surface finish layers 37 do not extend to the sidewalls of thepillars 36. The solder 54 fills the recess portion 362 but does notfurther extend to the sidewall of the pillar 36. In the manufacturingprocess, the surface finish layer 37 is formed on the recess portion 362of FIG. 28.

Referring to FIG. 30, a package substrate according to another of thepresent embodiments is illustrated. The package substrate 1 m comprisesa first dielectric layer 81, a second dielectric layer 82, a thirddielectric layer 83, a lower circuit layer 84, a first circuit layer 85,a second circuit layer 86, a third circuit layer 87, a plurality offirst interconnection metals 851, a plurality of second interconnectionmetals 861, a plurality of third interconnection metals 871, a pluralityof pillars 88, and an upper protection layer 89. Although the packagesubstrate 1 m is illustrated as including four circuit layers, in otherembodiments the package substrate 1 m may include only one, two, threeor five or more circuit layers.

The material of the first dielectric layer 81 may be a non-conductivepolymer such as polyimide (PI), epoxy, or benzocyclobutene (BCB).Alternatively, an inorganic passivation layer, such as, silicon dioxide(SiO₂), may be used. Alternatively, the first dielectric layer 81 may bemade of a fiber-reinforced resin material and/or prepreg (PP) forincreased rigidity. The fibers may be glass fibers, or KEVLAR® fibers(aramid fibers), for example. Examples of resin materials that may bereinforced by fibers for use in the laminated dielectric materialinclude Ajinomoto build-up film (ABF), bismaleimide triazine (BT),prepreg, polyimide (PI), liquid crystal polymer (LCP), epoxy, and otherresin materials. The first dielectric layer 81 has a plurality ofopenings 811 to expose parts of the lower circuit layer 84.

The lower circuit layer 84 is embedded in the first dielectric layer 81,and exposed from the lower surface of the first dielectric layer 81. Inthis embodiment, the lower surface of the lower circuit layer 84 iscoplanar with the lower surface of the first dielectric layer 81. Theexposed part of the lower circuit layer 84 acts as a ball land, e.g. aball grid array terminal, upon which a Ball Grid Array (BGA) solder ballis to be formed.

The first circuit layer 85 is disposed on the upper surface of the firstdielectric layer 81. The first interconnection metals 851 are disposedin the openings 811 of the first dielectric layer 81, and physicallycontact and electrically connect the lower circuit layer 84 and thefirst circuit layer 85.

The second dielectric layer 82 is disposed on the first dielectric layer81, and has a plurality of openings 821 to expose parts of the firstcircuit layer 85. The material of the second dielectric layer 82 may bethe same as or different from that of the first dielectric layer 81. Thesecond circuit layer 86 is disposed on the upper surface of the seconddielectric layer 82. The second interconnection metals 861 are disposedin the openings 821 of the second dielectric layer 82, and physicallycontact and electrically connect the first circuit layer 85 and thesecond circuit layer 86.

The third dielectric layer 83 is disposed on the second dielectric layer82, and has a plurality of openings 831 to expose parts of the secondcircuit layer 86. The material of the third dielectric layer 83 may bethe same as or different from that of the first dielectric layer 81. Thethird circuit layer 87 is disposed on the upper surface of the thirddielectric layer 83. In this embodiment, the third circuit layer 87 isthe uppermost circuit layer. The third interconnection metals 871 aredisposed in the openings 831 of the third dielectric layer 83, andphysically contact and electrically connect the second circuit layer 86and the third circuit layer 87.

The pillars 88 are disposed on the third circuit layer 87 andelectrically connected to the second circuit layer 86 and the firstcircuit layer 85. Each pillar 88 has a substantially circular columnshape or a substantially circular cylinder shape. Each of the pillars 88has a top surface 881 for making external electrical connection (forexample, to another electrical connection in a semiconductor chip), andthe top surfaces 881 of the pillars 88 are flat and substantiallycoplanar.

The upper protection layer 89 is disposed on the third circuit layer 87,and has at least one opening 891 to expose a portion of the thirdcircuit layer 87. The pillars 88 are disposed within a single opening891. In this embodiment, the upper protection layer 89 may be a soldermask made of, e.g. polyimide.

Referring to FIG. 31, a process for making a package substrate accordingto another of the present embodiments is illustrated. A carrier 80includes an upper surface 801, a lower surface 802, an upper metal foil803 disposed on the upper surface 801, and a lower metal foil 804disposed on the lower surface 802. Then, the lower circuit layer 84 isformed on the upper metal foil 803 and the lower metal foil 804. Bothportions of the lower circuit layer 84 may be formed at the same time.Then, a build-up process forms the first dielectric layer 81, the firstcircuit layer 85, the first interconnection metals 851, the seconddielectric layer 82, the second circuit layer 86, the secondinterconnection metals 861, the third dielectric layer 83, the thirdcircuit layer 87, and the third interconnection metals 871 on both sidesof the carrier 80 in sequence, so as to form two package substrates onthe carrier 80.

Then, a photoresist pattern 46 is formed on the third circuit layer 87.The photoresist pattern 46 has a plurality of openings 461 to expose apart of the third circuit layer 87. Then, a metal, such as copper, isapplied in the openings 461 of the photoresist pattern 46 to form thepillars 88. The pillars 88 may be formed by plating, for example. Then,the pillars 88 and the photoresist pattern 46 are planarized, so thateach of the pillars 88 has a top surface 881, and the top surfaces 881of the pillars 88 are substantially coplanar with the upper surface 462of the upper photoresist pattern 46. In this embodiment, the planarizingstep may be accomplished by grinding using a ceramic roller or a diamondroller, for example. Then, the two package substrates are detached fromthe carrier 80.

Then, the photoresist pattern 46 is removed, and the upper protectionlayer 89 is formed on the third circuit layer 87 to surround the pillars88 with at least one opening 891 to expose a part of the third circuitlayer 87. The upper protection layer 89 may be formed by coating, forexample. The pillars 88 are disposed within a single opening 891. Thus,the package substrate 1 m as shown in FIG. 30 is obtained.

Referring to FIG. 32, a package substrate according to another of thepresent embodiments is illustrated. The package substrate in comprises afirst dielectric layer 91, a second dielectric layer 92, a thirddielectric layer 93, a lower circuit layer 94, a first circuit layer 95,a second circuit layer 96, a third circuit layer 97, a plurality offirst interconnection metals 941, a plurality of second interconnectionmetals 951, a plurality of third interconnection metals 961, a pluralityof pillars 98, an upper protection layer 99, and a lower protectionlayer 991. Although the package substrate in is illustrated as includingfour circuit layers, in other embodiments, the package substrate in mayinclude only one, two, three or five or more circuit layers.

The material of the first dielectric layer 91 may be the same as that ofthe first dielectric layer 81 of FIG. 30, and the first dielectric layer91 has a plurality of openings 911. The lower circuit layer 94 isdisposed on the lower surface of the first dielectric layer 91, andcorresponds to the openings 911. The lower protection layer 991 isdisposed on the lower circuit layer 94, and exposes parts of the lowercircuit layer 94. In this embodiment, the lower protection layer 991 isa solder mask made of, e.g. polyimide. The exposed part of the lowercircuit layer 94 acts as a ball land, e.g., a ball grid array terminal,upon which a Ball Grid Array (BGA) solder ball is to be formed.

The second dielectric layer 92 is disposed on the first dielectric layer91, and has a plurality of openings 921. The material of the seconddielectric layer 92 may be the same as or different from that of thefirst dielectric layer 91. The first circuit layer 95 is disposed on thelower surface of the second dielectric layer 92. The firstinterconnection metals 941 are disposed in the openings 911 of the firstdielectric layer 91, and physically contact and electrically connect thelower circuit layer 94 and the first circuit layer 95.

The third dielectric layer 93 is disposed on the second dielectric layer92, and has a plurality of openings 931. The material of the thirddielectric layer 93 may be the same as or different from that of thefirst dielectric layer 91. The second circuit layer 96 is disposed onthe lower surface of the third dielectric layer 93. The secondinterconnection metals 951 are disposed in the openings 921 of thesecond dielectric layer 92, and physically contact and electricallyconnect the first circuit layer 95 and the second circuit layer 96.

The third circuit layer 97 is embedded in the third dielectric layer 93,and exposed from the upper surface of the third dielectric layer 93. Inthis embodiment, the upper surface of the third circuit layer 97 iscoplanar with the upper surface of the third dielectric layer 93. Inthis embodiment, the third circuit layer 97 is the uppermost circuitlayer. The third interconnection metals 961 are disposed in the openings931 of the third dielectric layer 93, and physically contact andelectrically connect the second circuit layer 96 and the third circuitlayer 97.

The pillars 98 are disposed on the third circuit layer 97 andelectrically connected to the second circuit layer 96 and the firstcircuit layer 95. Each pillar 98 has a substantially circular columnshape or a substantially circular cylinder shape. Each of the pillars 98has a top surface 981 for making external electrical connection (forexample, to another electrical connection in a semiconductor chip), andthe top surfaces 981 of the pillars 98 are flat and substantiallycoplanar. Each of the pillars 98 may have a thin metal layer 9041disposed on the bottom thereof to contact the third circuit layer 97.However, the thin metal layer 9041 may be omitted.

The upper protection layer 99 is disposed on the third circuit layer 97,and has at least one opening 992 to expose a part of the third circuitlayer 97. The pillars 98 are disposed within a single opening 992. Inthis embodiment, the upper protection layer 99 may be a solder mask madeof, e.g. polyimide.

Referring to FIGS. 33 to 38, a process for making a package substrateaccording to another of the present embodiments is illustrated.Referring to FIG. 33, a carrier 90 includes an upper surface 901, alower surface 902, an upper metal foil 903 disposed on the upper surface901, and a lower metal foil 904 disposed on the lower surface 902. Then,the third circuit layer 97 is formed on the upper metal foil 903 and thelower metal foil 904. Both portions of the third circuit layer 97 may beformed at the same time. Then, a build-up process forms the thirddielectric layer 83, the second circuit layer 96, the thirdinterconnection metals 961, the second dielectric layer 92, the firstcircuit layer 95, the second interconnection metals 851, the firstdielectric layer 91, the lower circuit layer 94, the firstinterconnection metals 941, and the lower protection layer 991 on bothsides of the carrier 90 in sequence, so as to form two packagesubstrates on the carrier 90.

Referring to FIG. 34, the two package substrates are detached from thecarrier 90. A portion of the upper metal foil 903 and the lower metalfoil 904 may remain on the third circuit layer 97, so as to form thinmetal layers 9031, 9041 on the third circuit layer 97. The thin metallayers 9031, 9041 may be omitted.

Referring to FIG. 35, an upper photoresist pattern 46 is formed on thethin metal layer 9041 or the third circuit layer 97, and a lowerphotoresist pattern 48 is formed on the lower circuit layer 94 and thelower protection layer 991. The photoresist pattern 46 has a pluralityof openings 461 to expose a portion of the thin metal layer 9041 or thethird circuit layer 97.

Referring to FIG. 36, a metal, such as copper, is applied in theopenings 461 of the photoresist pattern 46 to form the pillars 98. Thepillars 98 may be formed by plating, for example. Referring to FIG. 37,the pillars 98 and the photoresist pattern 46 are planarized, so thateach of the pillars 98 has a top surface 981, and the top surfaces 981of the pillars 98 are substantially coplanar with the upper surface 462of the upper photoresist pattern 46. In this embodiment, the planarizingstep may be accomplished by grinding using a ceramic roller 50 or adiamond roller, for example.

Referring to FIG. 38, the photoresist pattern 46 and the lowerphotoresist pattern 48 are removed. Then, the thin metal layer 9041 thatis not covered by the pillars 98 is removed. Then, the upper protectionlayer 99 is formed on the third circuit layer 97 to surround the pillars98 by coating, and has at least one opening 992 to expose a part of thethird circuit layer 97. The pillars 98 are disposed within a singleopening 992. Thus, the package substrate 1 n as shown in FIG. 32 isobtained.

While the invention has been described and illustrated with reference tospecific embodiments thereof, these descriptions and illustrations donot limit the invention. It should be understood by those skilled in theart that various changes may be made and equivalents may be substitutedwithout departing from the true spirit and scope of the invention asdefined by the appended claims. The illustrations may not be necessarilybe drawn to scale. There may be distinctions between the artisticrenditions in the present disclosure and the actual apparatus due tomanufacturing processes and tolerances. There may be other embodimentsof the present invention which are not specifically illustrated. Thespecification and the drawings are to be regarded as illustrative ratherthan restrictive. Modifications may be made to adapt a particularsituation, material, composition of matter, method, or process to theobjective, spirit and scope of the invention. All such modifications areintended to be within the scope of the claims appended hereto. While themethods disclosed herein have been described with reference toparticular operations performed in a particular order, it will beunderstood that these operations may be combined, sub-divided, orre-ordered to form an equivalent method without departing from theteachings of the invention. Accordingly, unless specifically indicatedherein, the order and grouping of the operations are not limitations ofthe invention.

What is claimed is:
 1. A package substrate, comprising: a dielectriclayer a circuit layer disposed on or in the dielectric layer; and aplurality of pillars disposed on the circuit layer, wherein each of thepillars has a top surface adapted for making external electricalconnection, and the top surfaces of the pillars are substantiallycoplanar with each other.
 2. The package substrate of claim 1, furthercomprising a protection layer disposed on the circuit layer, theprotection layer having an opening to expose a portion of the circuitlayer and the pillars.
 3. The package substrate of claim 1, furthercomprising a core portion, an inner circuit layer, and a plurality ofinterconnection metals, wherein the inner circuit layer is disposed onthe core portion, the dielectric layer is disposed on the inner circuitlayer, and the circuit layer is disposed on the dielectric layer,wherein the dielectric layer has a plurality of openings to expose theinner circuit layer, and the interconnection metals are disposed in theopenings of the dielectric layer to connect the inner circuit layer andthe circuit layer.
 4. The package substrate of claim 3, furthercomprising a plurality of conductive vias penetrating the core portionand electrically connecting the inner circuit layer.
 5. The packagesubstrate of claim 1, further comprising a second circuit layer and aplurality of interconnection metals, wherein the dielectric layer has aplurality of openings, and the interconnection metals are disposed inthe openings of the dielectric layer to connect the second circuit layerand the circuit layer.
 6. The package substrate of claim 5, wherein thecircuit layer is embedded in the dielectric layer and the second circuitlayer is disposed on the dielectric layer.
 7. The package substrate ofclaim 5, wherein the second circuit layer is embedded in the dielectriclayer and the circuit layer is disposed on the dielectric layer.
 8. Thepackage substrate of claim 1, wherein a coplanarity of the top surfacesof the pillars is ±3 μm.
 9. A package substrate, comprising: adielectric layer having an upper surface; a circuit layer disposed on orin the dielectric layer; and a plurality of pillars disposed on thecircuit layer, wherein heights of the pillars are substantially equal,wherein the heights are defined as the distance between a top end ofeach of the pillars and the upper surface of the dielectric layer. 10.The package substrate of claim 9, wherein a difference between agreatest pillar height and a least pillar height is less than 6 μm. 11.The package substrate of claim 9, further comprising a protection layerdisposed on the circuit layer, wherein the protection layer has at leastone opening, and the pillars are disposed within the at least oneopening.
 12. The package substrate of claim 9, further comprising a coreportion, an inner circuit layer, and a plurality of interconnectionmetals, wherein the inner circuit layer is disposed on the core portion,the dielectric layer is disposed on the inner circuit layer, and thecircuit layer is disposed on the dielectric layer, wherein thedielectric layer has a plurality of openings to expose the inner circuitlayer, and the interconnection metals are disposed in the openings ofthe dielectric layer to connect the inner circuit layer and the circuitlayer.
 13. The package substrate of claim 9, further comprising a secondcircuit layer and a plurality of interconnection metals, wherein thedielectric layer has a plurality of openings, and the interconnectionmetals are disposed in the openings of the dielectric layer to connectthe second circuit layer and the circuit layer.
 14. The packagesubstrate of claim 13, wherein the circuit layer is embedded in thedielectric layer and the second circuit layer is disposed on thedielectric layer.
 15. The package substrate of claim 13, wherein thesecond circuit layer is embedded in the dielectric layer and the circuitlayer is disposed on the dielectric layer.
 16. A process for making apackage substrate, comprising: providing a dielectric layer with acircuit layer disposed thereon or therein; forming a photoresist patternadjacent to the circuit layer, wherein the photoresist pattern has aplurality of openings; forming a plurality of pillars in the openings ofthe photoresist pattern, wherein the pillars are electrically connectedto the circuit layer; planarizing the pillars so that each of thepillars has a top surface, and the top surfaces of the pillars aresubstantially coplanar with each other; and removing the photoresistpattern.
 17. The process of claim 16, wherein providing the dielectriclayer further comprises: providing a core portion with an inner circuitlayer disposed thereon; forming the dielectric layer on the innercircuit layer, wherein the dielectric layer has a plurality of openingsto expose the inner circuit layer; and forming the circuit layer on thedielectric layer and a plurality of interconnection metals in theopenings of the dielectric layer to connect the inner circuit layer andthe circuit layer, wherein the photoresist pattern is formed on thecircuit layer, and the pillars are formed on the circuit layer.
 18. Theprocess of claim 16, wherein providing the dielectric layer furthercomprises: providing a carrier with a second circuit layer disposedthereon; forming the dielectric layer on the second circuit layer,wherein the dielectric layer has a plurality of openings to expose thesecond circuit layer; forming the circuit layer on the dielectric layerand a plurality of interconnection metals in the openings of thedielectric layer to connect the second circuit layer and the circuitlayer; and removing the carrier.
 19. The process of claim 18, whereinthe photoresist pattern is formed on the second circuit layer and thepillars are formed on the second circuit layer.
 20. The process of claim18, wherein the photoresist pattern is formed on the circuit layer andthe pillars are formed on the circuit layer.